Noise reduction in MEMS Accelerometer by using Kalman Filter

  • Raosaheb Pawar
  • Yogesh Shirke
  • Prashant Titare
Keywords: MEMS accelerometer, Kalman filter, electronic noise, thermal mechanical noise

Abstract

A Kalman filter is designed and implemented for a MEMS capacitive accelerometer in order to filter out two major noise sources in the accelerometer, which are electronic noise and thermal mechanical noise (Brown noise). The dynamic modeling of the MEMS accelerometer is developed. A Kalman filter act as observer in system modeling and Simulation results Show that the Kalman filter based observer produces an excellent noise reduction, improve the performance of accelerometer which is used in many navigation and automobile application. Paper also discusses the noise sources present in the accelerometer.

References

[1]. Tai-Ran. Hsu, MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering, WILEY INTERSCIENCE, 2008. [2]. J. Bernstein, “Low-Noise MEMS Vibration Sensor for Geophysical Application”, Journal of MEMS, vol.8, no. 4, pp. 433-438, 1999. [3]. G. Zhang, “Design and Simulation of a COMS-MEMS Accelerometer”, M.S. Thesis, Dept. of Electrical and Computer Engineering (ECE), Carnegie Mellon University, 1998.
[4] J. Doscher, “Using iMEMS Accelerometers in Instrument Applications,” Analog Devices Technical Note, available at http://www.analog.com/industry/iMEMS/Lib rary/.
[5] G.K. Fedder, “Simulation of Microelectromechanical System,” Doctoral Dissertation, Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, 1997. [5] A. Lawrence, Modern Inertial Technology: Navigation, Guidance and Control. Springer Verlag, New York, 1993 [6] C. Hong, B. Minhang, Z. Haijun, S. Shaoqun, A piezorezistive accelerometer with a novel vertical beam structure.
Published
2018-01-07
How to Cite
Pawar, R., Shirke, Y., & Titare, P. (2018). Noise reduction in MEMS Accelerometer by using Kalman Filter. Asian Journal For Convergence In Technology (AJCT) ISSN -2350-1146, 3(3). Retrieved from http://asianssr.org/index.php/ajct/article/view/307
Section
Article

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